DryScrub^®

DryScrub® Nitride Process Application - an Example of a Calculation for the Electrode Life Expectancy Quick Estimation of Electrode Life Expectancy Electrochemical Technology Corporation strongly recommends DryScrub^® users to replace the electrode when about 2000 cm^3 solid waste is collected. The following expression can be used to make a quick calculation of how many running processes can last before replacing the electrode. Where: C is a constant whose value is listed in the summary table. Q is the flow rate of hydride gas in sccm, and t is the processing time per run in minute. The above expression is based upon the assumption that about 10% of input hydride gases is reacted to form the wafer film.

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