Application Reports - LPCVD BPSG/BPSG

Electrochemical Technology Corporation DryScrub^®

Reported Benefits Derived from DryScrub^® Installations:

failures and rebuilds reduced from 6 in 12 months, to none in over 4 years.
wafer load losses due to particle caused failures reduced from 4 per year, to none in over 4 years.
exhaust side manifold maintenance, caused by particle accumulation, reduced from 3 week intervals to 6 month intervals.
pump vibration and noise level is reduced to a constant decibel level during idle and processing (per OSHA "A" and "C" weighting methods).
purge gas consumption reduced.

no pump in-process failures in over 4 years; major pump rebuilds reduced from 3 month intervals, to scheduled minor preventative maintenance once every year.
PFPE oil filter maintenance reduced by a factor of 10.
PFPE fluid losses significantly reduced to make-up oil lost as a function of filter change.
pump and fluid related maintenance reduced from >30 hours per month, to
exhaust side manifold maintenance, caused by PFPE oil vapour and particle accumulation reduced.
purge gas consumption, and gas velocity reduced, further reducing PFPE oil vapour loss.

predictability of, and reduced maintenance events have allowed re-direction of personnel to other fab requirements.
treatment of undiluted deposition proccss effluent gases results in hazardous and/or toxic waste reduction, consequently reducing operating costs.
personnel exposure to hazardous and/or toxic wastes is reduced.

relative to equipment related considerations, configured with dry or oil sealed pumps, ROI was achieved within 1 year.
ROI is achieved very quickly relative to increased productivity; particularly, the reduction of just one wafer load loss more than pays for DryScrub^® System purchase, installation, and a year of operating costs.