DryScrub^®

The 2DH Specification The 2DH uses newly patented plasma technology which turbo charges the performance. Its compact size with ingenious design is readily adaptable for small space installations. Specifications* CHAMBER: Operating Pressure - 5 to 10,000Pa (37 to 75,000 mTorr) Dimensions: 420 mm H x290 mm W x 290 mm D. Mating Flange, Top and Bottom: ISO80 Bolt/Clamp Flanges. Flange to Flange separation: 350 mm Clearance: Top and Bottom 10 mm; Side 5 mm Front Clearance for Service 300 mm H x 310 mm W x 300 mm D Weight: Removable Center Cylinder: 5.2 kg, Top / Bottom plates: 8.8 kg. Chamber Mounting Bolts: M8 (Metric Bolts) Installation Orientation: Any Orientation ELECTRODE: (New Patent Application) Material 316L Stainless steel (reusable ) Weight: Empty Approximate 8 kg Loaded up to 2 to 20 kg additional waste - process dependent. Dimensions 254 mm OD x 300mm H. Electrode Surface Area > 2.7 M2 Solid Waste Volume > 2,000 cm3 Operating time between cleanings - process dependent, 1 to 12 Months Reusable - In-situ Etch Cleaning or External Cleaning RF POWER SUPPLY: PS 1500 Dimensions, 177 mm H x 292 mm W x 464 mm D. Weight = 13 kg. Line = 208 V, Single Phase, 60/50 Hz, 25 Amps ( P.F. 0.72x). Load Power: 1500 watts * Subject to change without notification

---

Home Why DryScrub? DryScrub Overview DryScrub Systems Application Reports
Performance Benefits FAQ's Technical Notes Images Register About ETC

© Copyright 2001 Electrochemical Technology Corporation.

Tel: +1-408-DryScrub	(379-7278)	Sales@DryScrub.com	(Sales Information)
Toll Free: +1-888-DryScrub	(379-7278)	Technical@DryScrub.com	(Technical Information)
Fax +1-408-744-0446		Service@DryScrub.com	(Service Information)